Analisa Desain dan Perancangan Ruang Vakum Medium Sebagai Media Pembangkitan Plasma Oksigen Menggunakan Gelombang Mikro 2,45 GHZ
Abstract
Keywords: microwave, plasma, ashing, vacuum, mean free path, ionization.
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DOI: https://doi.org/10.24167/praxis.v2i2.2532
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